An Original Rotational RF MEMS Based on Multi-Varactors on a Chip
Résumé
The design studied is an innovative MEMS rotational structure dedicated to RF applications around 10GHz. The originality relies on the integration of several tunable micro-capacitors on a single chip. The rotational structure offers the possibility to obtain high displacement in the structure outskirt (over 200μm) for actuation voltage around 40V (with extremely low current thanks to electrostatic actuation). Design, fabrication and measurements are presented in this paper.
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