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Communication Dans Un Congrès Année : 2016
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hal-02439747 , version 1 (14-01-2020)

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Etienne Herth, Franck Lardet-Vieudrin, Laurie Valbin, Gaelle Bazin Lissorgues. Mechanical behavior of T-shaped A1N membrane based on thin film elongation acoustic resonator. 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, Hungary. pp.1-4, ⟨10.1109/DTIP.2016.7514867⟩. ⟨hal-02439747⟩
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