Journal Articles Microsystem Technologies Year : 2011

A new design for rotational, tunable wideband RF MEMS capacitors

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Electromagnetism Materials Micro and nanotechnologies/Microelectronics Electronics Biomaterials

Gaelle Lissorgues  : Connect in order to contact the contributor

https://hal.science/hal-02435465

Submitted on : Friday, January 10, 2020-6:20:59 PM

Last modification on : Friday, July 19, 2024-11:38:04 AM

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hal-02435465 , version 1 (10-01-2020)

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Julien Pagazani, Pierre Nicole, Lionel Rousseau, Frédéric Marty, Gaelle Bazin Lissorgues. A new design for rotational, tunable wideband RF MEMS capacitors. Microsystem Technologies, 2011, 17 (4), pp.513-522. ⟨10.1007/s00542-011-1226-x⟩. ⟨hal-02435465⟩

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