First stages of metal surface nanostructuration by He + implantation: plasma experiments and molecular dynamics simulations
Résumé
Interaction of helium ions with metals in particular conditions (high ion fluxes, low kinetic energies, high temperature) is known to lead to the formation of nanostructured porous surfaces. First stages of this process, associated to the formation of vacancy defects in the metal lattice, have been investigated using an ICP-RF plasma source specially designed and equipped with various plasma diagnostics to qualify the implantation conditions. Results of experimental implantations in tungsten are compared to simulated ones obtained by molecular dynamics.
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