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Journal Articles Thin Solid Films Year : 2013

Multireflection grazing incidence diffraction used for stress measurementsin surface layers

Abstract

The geometry based on the multireflection grazing incidence X-ray diffraction can be applied to measure residual stresses. Using this method, it is possible to perform a non-destructive analysis of the heterogeneous stresses for different and well defined volumes below the surface of the sample (range of several μm). As the result, the average values of stresses weighted by absorption of X-ray radiation are measured. In this work the stress profiles as a function of penetration depth were determined for mechanically polished Al sample. Measurements and verification of the method were performed using classical X-ray diffractometer and synchrotron radiation with different wavelengths.
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Dates and versions

hal-02350745 , version 1 (06-11-2019)

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Marianna Marciszko, Andrzej Baczmanski, Miroslaw Wrobel, Wilfried Seiler, Chedly Braham, et al.. Multireflection grazing incidence diffraction used for stress measurementsin surface layers. Thin Solid Films, 2013, 530, pp.81-84. ⟨10.1016/j.tsf.2012.05.042⟩. ⟨hal-02350745⟩
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