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Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2015

MEMS probes for on-wafer RF microwave characterization of future microelectronics: design, fabrication and characterization

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hal-02345571 , version 1 (04-11-2019)

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Jaouad Marzouk, S. Arscott, Abdelhatif El Fellahi, Kamel Haddadi, Tuami Lasri, et al.. MEMS probes for on-wafer RF microwave characterization of future microelectronics: design, fabrication and characterization. Journal of Micromechanics and Microengineering, 2015, 25 (7), pp.075024. ⟨10.1088/0960-1317/25/7/075024⟩. ⟨hal-02345571⟩
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