Argon ion and neutral metastable levels destruction in a magnetically enhanced Inductively coupled plasma reactor - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Open Plasma Physics Journal Année : 2013

Argon ion and neutral metastable levels destruction in a magnetically enhanced Inductively coupled plasma reactor

T. Bieber
  • Fonction : Auteur
X. Glad
  • Fonction : Auteur
  • PersonId : 965716
  • IdRef : 181557266
R. Hugon
J. Bougdira

Résumé

This paper deals with pure argon plasma studied in a magnetically enhanced inductively coupled reactor. Laser induced fluorescence technique was performed with an optical parametric oscillator laser on the 3d 4 F 7/2 and 3d 2 G 9/2 Ar + metastable levels and on the (2P 3/2 0)4s 2 neutral metastable state to determine their relative densities. Langmuir probe was used as a complementary diagnostic to measure the electron energy distribution functions. When increasing the confinement magnetic field, the metastable state density collapses for all cited levels, by contrast with n e which is continuously growing. Calculations were carried out for neutral argon to explain this behaviour. The results show that the metastable population is depleted by electron-impact excitation and ionization, these loss processes becoming dominant compared to the metastable state creation term.
Fichier principal
Vignette du fichier
version publiee.pdf (715.01 Ko) Télécharger le fichier
Origine : Fichiers éditeurs autorisés sur une archive ouverte
Loading...

Dates et versions

hal-02314395 , version 1 (12-10-2019)

Identifiants

Citer

T. Bieber, X. Glad, L. de Poucques, R. Hugon, J.-L Vasseur, et al.. Argon ion and neutral metastable levels destruction in a magnetically enhanced Inductively coupled plasma reactor. Open Plasma Physics Journal, 2013, 6 (1), pp.32 - 43. ⟨10.2174/1876534301306010032⟩. ⟨hal-02314395⟩
66 Consultations
51 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More