Microstructure Characterization of Multilayer Thin Coatings ZrN/Si 3 N 4 by X-Ray Diffraction Using Noncoplanar Measurement Geometry - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue physica status solidi (a) Année : 2018

Microstructure Characterization of Multilayer Thin Coatings ZrN/Si 3 N 4 by X-Ray Diffraction Using Noncoplanar Measurement Geometry

Svetlana Vlasenko
  • Fonction : Auteur
Andrei Benediktovitch
  • Fonction : Auteur
Alex Ulyanenkov
  • Fonction : Auteur
Vladimir Uglov
  • Fonction : Auteur
Jacques O'Connell
  • Fonction : Auteur
Arno Janse van Vuuren
  • Fonction : Auteur

Résumé

The structural characterization of multilayer thin coatings is performed by X‐ray diffraction using a noncoplanar measurement geometry. The application of such a measurement geometry enables a reliable and comprehensive microstructural analysis of the material comparing to other measurement geometries due to the accessibility to a larger number of measured Bragg reflections. The important advantage of noncoplanar geometry is a measurement setup without tilting and rotating the sample. A set of profiles for different Bragg reflections is measured for several multilayer coatings with different thicknesses of individual layers; the obtained profiles are combined into a single scan for the simultaneous fittingby a theoretical curve. The broadening of the diffraction profiles is considered to be affected by a small grain size and instrumental effects, with the grains being modeled by ellipsoidal shape with two equal in‐plane axes. Based on the proposed fitting procedure, the microstructural parameters of multilayer coatings are evaluated, including the grains size in parallel and normal to the surface directions. The dependence of evaluated grains size on the measurement direction confirms the validity of the selected grains model. The microstructural parameters evaluated from noncoplanar X‐ray diffraction show a good agreement with those obtained from HRTEM and STEM techniques.
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Dates et versions

hal-02308403 , version 1 (08-10-2019)

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Svetlana Vlasenko, Andrei Benediktovitch, Alex Ulyanenkov, Vladimir Uglov, Grégory Abadias, et al.. Microstructure Characterization of Multilayer Thin Coatings ZrN/Si 3 N 4 by X-Ray Diffraction Using Noncoplanar Measurement Geometry. physica status solidi (a), 2018, 215 (5), pp.1700670. ⟨10.1002/pssa.201700670⟩. ⟨hal-02308403⟩
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