Integrated microfluidic–microoptical systems fabricated by dry etching of soda-lime glass - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Microelectronic Engineering Année : 2008

Integrated microfluidic–microoptical systems fabricated by dry etching of soda-lime glass

Dates et versions

hal-02281762 , version 1 (09-09-2019)

Identifiants

Citer

Julien Vieillard, Radoslaw Mazurczyk, Lynda-Lawrence Boum, Aude Bouchard, Yann Chevolot, et al.. Integrated microfluidic–microoptical systems fabricated by dry etching of soda-lime glass. Microelectronic Engineering, 2008, 85 (2), pp.465-469. ⟨10.1016/j.mee.2007.08.005⟩. ⟨hal-02281762⟩
60 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More