Achieving High Quality Factor Without Vacuum Packaging by High Density Proof Mass Integration in Vibration Energy Harvesters - Archive ouverte HAL
Article Dans Une Revue Journal of Microelectromechanical Systems Année : 2019
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hal-02273397 , version 1 (28-08-2019)

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Andre Dompierre, Srikar Vengallatore, Luc Frechette. Achieving High Quality Factor Without Vacuum Packaging by High Density Proof Mass Integration in Vibration Energy Harvesters. Journal of Microelectromechanical Systems, 2019, 28 (3), pp.558-568. ⟨10.1109/JMEMS.2019.2910228⟩. ⟨hal-02273397⟩
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