Enhanced oxidation of TiAlN barriers integrated in three-dimensional ferroelectric capacitor structures
J. Lisoni
(1)
,
J. Johnson
(1)
,
L. Goux
(1)
,
V. Paraschiv
(1)
,
D. Maes
(1)
,
H. van Der Meeren
(1)
,
M. Willegems
(1)
,
L. Haspeslagh
(1)
,
J. Wouters
(1)
,
C. Caputa
(2)
,
R. Zambrano
(2)
,
C. Turquat
(3)
,
Christophe Muller
(3)