Journal Articles
Chemical Physics
Year : 1988
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https://hal.science/hal-02190625
Submitted on : Monday, July 22, 2019-3:51:19 PM
Last modification on : Friday, March 24, 2023-2:53:11 PM
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G. Sultan, G. Baravian, M. Gantois, G. Henrion, H. Michel, et al.. Doppler-broadened Hα line shapes in A dc low-pressure discharge for TiN deposition. Chemical Physics, 1988, 123 (3), pp.423-429. ⟨10.1016/0301-0104(88)87051-4⟩. ⟨hal-02190625⟩
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