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Article Dans Une Revue Journal of Physics D: Applied Physics Année : 2001

Time-resolved plasma diagnostics for a better understanding of the improvement of pulsed MWPACVD of diamond

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hal-02190574 , version 1 (22-07-2019)

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L De Poucques, J. Bougdira, R. Hugon, G. Henrion, P. Alnot. Time-resolved plasma diagnostics for a better understanding of the improvement of pulsed MWPACVD of diamond. Journal of Physics D: Applied Physics, 2001, 34 (6), pp.896-904. ⟨10.1088/0022-3727/34/6/311⟩. ⟨hal-02190574⟩
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