Journal Articles
Semiconductor Science and Technology
Year : 2019
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Submitted on : Monday, July 1, 2019-3:23:58 PM
Last modification on : Saturday, September 27, 2025-7:26:23 PM
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Fabien Rozé, Francois Pierre, Olivier Gourhant, François Bertin, Elisabeth Blanquet, et al.. Crystal quality of SiGe films fabricated by the condensation technique and characterized by medium energy ion scattering. Semiconductor Science and Technology, 2019, 34 (6), pp.065005. ⟨10.1088/1361-6641/ab171c⟩. ⟨hal-02169850⟩
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