Orthogonal chemical functionalization of patterned Au/TiW substrate for selective immobilization of nanoparticles
Résumé
A current evolution of nanobiosensors stresses the interest of multi-material nanopatterned surfaces, for enhancing sensing performances. Besides, titanium tungsten (TiW) is mastered routinely implemented in nanoelectronic devices, in a reproducible way and at industrial production scales. Such material may be envisioned for being used in (bio)chemical nanoelectronic sensors, but the surface functionalization of such material has still to be studied. In the present article, orthogonal chemical functionalization of patterned Au on titanium tungsten (TiW) substrates have been explored for the first time to our knowledge. Surface functionalizations were assessed by X-ray photoelectron spectroscopy (XPS), polarization modulation infrared reflection-absorption spectroscopy (PMIRRAS) and time-of-flight secondary ion mass spectrometry (ToF-SIMS) imaging. Au/TiW patterned substrates were functionalized with mercapto-undecamine. Thanks to the orthogonality of thiol/Au versus phosphonic acid/TiW reactions, only Au features were modified leading to the amine derivatized surface. It allowed localizing carboxy-functionalized nanoparticles by electrostatic interaction on Au with a selectivity above 10 compared to TiW.
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