Atomic layer deposition of zinc indium sulfide films: Mechanistic studies and evidence of surface exchange reactions and diffusion processes - Archive ouverte HAL
Article Dans Une Revue Journal of Vacuum Science & Technology A Année : 2013

Atomic layer deposition of zinc indium sulfide films: Mechanistic studies and evidence of surface exchange reactions and diffusion processes

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Chimie
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hal-02148647 , version 1 (05-06-2019)

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Pascal Genevée, Frédérique Donsanti, Nathanaelle Schneider, Daniel Lincot. Atomic layer deposition of zinc indium sulfide films: Mechanistic studies and evidence of surface exchange reactions and diffusion processes. Journal of Vacuum Science & Technology A, 2013, 31 (1), pp.01A131. ⟨10.1116/1.4768919⟩. ⟨hal-02148647⟩
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