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Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2015

An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Résumé

We present a micromachined vertical scanner with 4 x 4 array of suspended 'spider-type' micromirrors which is a key component of a multi-channel 'active' Mirau microinterferometer. The microscanner provides for the vertical displacement of the reference micromirrors for the implementation of the phase shifting technique. Vertical comb-drive structures are employed for actuation of the micromirrors (displacement range of hundreds of nm at 500 Hz) as well as for in situ capacitive displacement sensing. Integration of micro-opto-electro-mechanical microscanners in a handheld interference microscope has the advantage of significantly decreasing instrument size because of the small footprint of the microscanner. Particularly interesting applications of the microscanner are low-cost and portable microsystems for the parallel inspection of biological tissues, e.g. for early diagnosis of specific diseases such as skin cancers.
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Dates et versions

hal-02131371 , version 1 (16-05-2019)

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Justine Lullin, Sylwester Bargiel, Patrice Moal, Stéphane Perrin, Jorge Silvestre, et al.. An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry. Journal of Micromechanics and Microengineering, 2015, 25 (11), pp.115013. ⟨10.1088/0960-1317/25/11/115013⟩. ⟨hal-02131371⟩
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