Miniaturized 3D gas sensors based on silicon nanowires for ppb range detection
Résumé
Here, we reported 3D devices implemented on silicon nanowires (SiNW) for chemical gas sensing, working at room temperature and in presence of moisture or interfering gas. This sensor combines for the first time high sensibility, selectivity, reversibility, low-power consumption and reliability in real condition. In addition the sensors are miniaturized and develop through a cost effective and large scale approach.
| Origine | Fichiers produits par l'(les) auteur(s) |
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