Design and fabrication of cooled silicon bolometers for mm wave detection - Archive ouverte HAL
Article Dans Une Revue Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Année : 2018

Design and fabrication of cooled silicon bolometers for mm wave detection

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hal-02022640 , version 1 (18-02-2019)

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V. Goudon, A. Aliane, W. Rabaud, C. Vialle, S. Pocas, et al.. Design and fabrication of cooled silicon bolometers for mm wave detection. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2018, 912, pp.78-81. ⟨10.1016/j.nima.2017.10.057⟩. ⟨hal-02022640⟩
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