DC nitrogen plasma assisted Femtosecond Pulsed Laser Deposition of Carbon-Nitrogen alloy for environmental analytical Microsystems: thin films characterization and in situ plume analysis - Archive ouverte HAL Accéder directement au contenu
Poster De Conférence Année : 2015

DC nitrogen plasma assisted Femtosecond Pulsed Laser Deposition of Carbon-Nitrogen alloy for environmental analytical Microsystems: thin films characterization and in situ plume analysis

Florent Bourquard
Teddy Tite
  • Fonction : Auteur
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A.-S. Loir
Christophe Donnet
Florence Garrelie
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hal-02019305 , version 1 (14-02-2019)

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  • HAL Id : hal-02019305 , version 1

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Chiranjeevi Maddi, Florent Bourquard, Teddy Tite, Nedjla Zehani, Philippe Fortgang, et al.. DC nitrogen plasma assisted Femtosecond Pulsed Laser Deposition of Carbon-Nitrogen alloy for environmental analytical Microsystems: thin films characterization and in situ plume analysis. Conference on Laser Ablation 2015, Aug 2015, Cairns, Australia. ⟨hal-02019305⟩
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