Influence of Aluminum Incorporation on Mechanical Properties of 3C-SiC Epilayers - Archive ouverte HAL Access content directly
Conference Papers Year : 2018
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hal-02017420 , version 1 (13-02-2019)

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Jean-François Michaud, Marcin Zielinski, Jaweb Ben Messaoud, Thierry Chassagne, Marc Portail, et al.. Influence of Aluminum Incorporation on Mechanical Properties of 3C-SiC Epilayers. International Conference on Silicon Carbide and Related Materials, Sep 2017, Washington, United States. pp.318-321, ⟨10.4028/www.scientific.net/MSF.924.318⟩. ⟨hal-02017420⟩
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