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Communication Dans Un Congrès Année : 2017

Out-of-equilibrium body potential measurements in pseudo-MOSFET for biosensing

Résumé

A novel method for surface charge sensing using the Ψ-MOSFET is presented. Systematic measurements of out-of-equilibrium body potential were performed on SOI wafers. The interest of Ψ-MOSFET as a biochemical sensor is experimentally proved. The advantages of this method are good sensitivity, simplicity and low-voltage reading compared to the conventional I D -V G method.
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Dates et versions

hal-02007128 , version 1 (05-02-2019)

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Licinius Benea, Maryline Bawedin, Cécile Delacour, Sorin Cristoloveanu, Irina Ionica. Out-of-equilibrium body potential measurements in pseudo-MOSFET for biosensing. 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Apr 2017, Athens, Greece. pp.19-22, ⟨10.1109/ULIS.2017.7962590⟩. ⟨hal-02007128⟩
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