Sub-band modulated electronic transport in planar fully-depleted silicon-on-insulator MOSFETs - Archive ouverte HAL
Communication Dans Un Congrès Année : 2014

Sub-band modulated electronic transport in planar fully-depleted silicon-on-insulator MOSFETs

Résumé

Multicarrier transport planar fully-depleted silicon-on-insulator MOSFETs has been investigated employing magnetic-field dependent geometrical magnetoresistance measurements and high-resolution mobility spectrum analysis. The results indicate that electronic transport in the 10 nm thick Si channel layer is due to two distinct and well-defined electron species. According to self-consistent Poisson-Schrödinger calculations, the two distinct electron species detected correspond to carriers in distinct energy sub-bands arising from strong carrier confinement and volume inversion. The mobility peak of the dominant carrier was found to occur under gate bias conditions that result in a minimum perpendicular effective electric field.
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Dates et versions

hal-02004000 , version 1 (01-02-2019)

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G. Umana-Membreno, S.-J. Chang, M. Bawedin, J. Antoszewski, S. Cristoloveanu, et al.. Sub-band modulated electronic transport in planar fully-depleted silicon-on-insulator MOSFETs. 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD), Dec 2014, Perth, Australia. pp.294-297, ⟨10.1109/COMMAD.2014.7038715⟩. ⟨hal-02004000⟩
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