Guided SH-SAW sensor based on DWNTs sensitive material for VOCs and humidity detection

This work focuses on the application related to the detection of low moisture and environmental pollutants. A novel gas sensor with inkjet printed Double Walled Carbon Nano Tubes (DWNTs) on a guided SH-SAW (Love wave) sensor platform was developed for Volatile Organic Compounds (VOCs) and humidity detection application. The experiments were conducted in real-time at ambient conditions. Results demonstrate the adsorption of vapor compounds on DWNTs sensitive material and leads for example to frequency shifts of 1.97 kHz and 2.93 kHz with 120 ppm of ethanol vapor and 6.22 % RH, respectively.

Mots clés

Love wave device gas sensor SH-SAW platform CNTs DWNTs

Domaines

Micro et nanotechnologies/Microélectronique Instrumentations et Détecteurs [physics.ins-det]

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https://hal.science/hal-01999495

Soumis le : mercredi 30 janvier 2019-10:26:57

Dernière modification le : mardi 8 octobre 2024-13:00:04

Dates et versions

hal-01999495 , version 1 (30-01-2019)

Identifiants

HAL Id : hal-01999495 , version 1
DOI : 10.29292/jics.v13i3.32

Citer

Hamida Hallil, Qing Zhang, Emmanuel Flahaut, Jean-Luc Lachaud, Philippe Coquet, et al.. Guided SH-SAW sensor based on DWNTs sensitive material for VOCs and humidity detection. Journal of Integrated Circuits and Systems, 2018, 13 (3), pp.1-4. ⟨10.29292/jics.v13i3.32⟩. ⟨hal-01999495⟩

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CNRS IMS-BORDEAUX MICROSYSTEMES IMS-BORDEAUX-FUSION INC-CNRS IMS-GPU-ENVIRONNEMENTS ANR TOULOUSE-INP UNIV-UT3 UT3-TOULOUSEINP CIRIMAT

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