Use of Computational Fluid Dynamics (CFD) simulations to predict and tune the deposition mode in close-proximity Spatial Atomic Layer Deposition (SALD) - Archive ouverte HAL Accéder directement au contenu
Poster De Conférence Année : 2018

Use of Computational Fluid Dynamics (CFD) simulations to predict and tune the deposition mode in close-proximity Spatial Atomic Layer Deposition (SALD)

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Matériaux
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Dates et versions

hal-01979497 , version 1 (13-01-2019)

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  • HAL Id : hal-01979497 , version 1

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César Masse de La Huerta, Viet Nguyen, Pedro Brandao Veiga, Jean-Marc Dedulle, Daniel Bellet, et al.. Use of Computational Fluid Dynamics (CFD) simulations to predict and tune the deposition mode in close-proximity Spatial Atomic Layer Deposition (SALD). COMSOL Conference 2018, Oct 2018, Laussanne, Switzerland. ⟨hal-01979497⟩
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