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Article Dans Une Revue Materials Chemistry and Physics Année : 2017

Improvement of chemical, physical, and electrical properties of parylene-D deposited by chemical vapor deposition by controlling the parameters process

M. Mokni
  • Fonction : Auteur
F. Jomni
  • Fonction : Auteur
Jean-Luc Garden
E. André
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hal-01962998 , version 1 (21-12-2018)

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M. Mokni, A. Kahouli, F. Jomni, Jean-Luc Garden, E. André, et al.. Improvement of chemical, physical, and electrical properties of parylene-D deposited by chemical vapor deposition by controlling the parameters process. Materials Chemistry and Physics, 2017, 186, pp.598-611. ⟨10.1016/j.matchemphys.2016.11.042⟩. ⟨hal-01962998⟩
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