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Article Dans Une Revue Thin Solid Films Année : 2018

Structural study of NiOx thin films fabricated by radio frequency sputtering at low temperature

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hal-01908690 , version 1 (30-10-2018)

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Zhang Song, Tiphaine Bourgeteau, Itaru Raifuku, Yvan Bonnassieux, Erik Johnson, et al.. Structural study of NiOx thin films fabricated by radio frequency sputtering at low temperature. Thin Solid Films, 2018, 646, pp.209 - 215. ⟨10.1016/j.tsf.2017.12.003⟩. ⟨hal-01908690⟩
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