Electrical characterization of undoped diamond films for RF MEMS application
Résumé
Diamond films are considered as superior dielectric in comparison to Si3N4 for MEMS applications. The present paper provides a detail characterization study of electrical properties of undoped microcrystalline diamond films involving dc and charge/discharge transient analysis over a wide temperature range. The aim of the study is to provide a better insight on the physical mechanisms responsible for the charge injection and collection processes under different operation conditions applicable to MEMS capacitive switches.
Mots clés
diamond
RF MEMS
dielectric charging
charge collection
electrical characterization
Conductivity
dielectric thin films
Micromechanical devices
Electric fields
Temperature measurement
transient analysis
microswitches
RF MEMS application
electrical properties
undoped microcrystalline diamond films
charge-discharge transient analysis
dc transient analysis
charge injection process
charge collection process
MEMS capacitive switches
thin film