Wide Band Frequency Characterization of Al-Doped and Undoped Rutile TiO 2 Thin Films for MIM Capacitors
Résumé
In this letter, the dielectric properties of rutile TiO2 thin films are studied for metal-insulator-metal capacitor applications. The dielectric constant, the ac conductivity, and the loss tangent are measured in a wide band frequency range, from 1 Hz to 2 GHz. The effect of aluminum doping, as well as the influence of film thickness, on the dielectric properties is presented.