Engineered core-shell Si1−xGex/Ge nanowires fabricated by focused ion beam and oxido-reduction - Archive ouverte HAL
Article Dans Une Revue Journal of Applied Physics Année : 2013

Engineered core-shell Si1−xGex/Ge nanowires fabricated by focused ion beam and oxido-reduction

Résumé

We demonstrate that perfectly reproducible and homogeneous core-shell Si1−xGex/Ge nanowires can be produced by a two step nanofabrication process. The process makes use of a combination of Liquid Metal Alloy Ion Source–Focused Ion Beam (LMAIS-FIB) nanomilling and condensation. In a first step, we fabricate arrays of SiGe wires by LMAIS-FIB milling of fully relaxed Si1−xGex pseudo-substrates. The use of Ge2+ ions during this step avoids any metallic contamination of the nanowires. In a second step, we both reduce the diameter of the wires and form the core-shell configuration by oxido-reduction of the wires. Large arrays of core-shell nanowires with extended aspect ratio (length over diameter), small diameters and ultra-thin shell thickness are fabricated. Multilayer core-shell configurations with tunable arrangements could also be produced by repeated condensation cycles.
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Dates et versions

hal-01811411 , version 1 (08-06-2018)

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Mansour Aouassa, A. Ronda, Luc Favre, A. Delobbe, P. Sudraud, et al.. Engineered core-shell Si1−xGex/Ge nanowires fabricated by focused ion beam and oxido-reduction. Journal of Applied Physics, 2013, 114 (3), pp.034301--034301--5. ⟨10.1063/1.4813097⟩. ⟨hal-01811411⟩
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