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Article Dans Une Revue Plasma Sources Science and Technology Année : 2014

Time-resolved ion flux, electron temperature and plasma density measurements in a pulsed Ar plasma using a capacitively coupled planar probe

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hal-01798624 , version 1 (23-05-2018)

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Maxime Darnon, Gilles Cunge, Nicholas St J Braithwaite. Time-resolved ion flux, electron temperature and plasma density measurements in a pulsed Ar plasma using a capacitively coupled planar probe. Plasma Sources Science and Technology, 2014, 23 (2), ⟨10.1088/0963-0252/23/2/025002⟩. ⟨hal-01798624⟩

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