Direct Insight into Grains Formation in Si Layers Grown on 3C-SiC by Chemical Vapor Deposition - Archive ouverte HAL Access content directly
Journal Articles Acta Materialia Year : 2015
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hal-01784770 , version 1 (03-05-2018)

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Rami Khazaka, Marc Portail, Philippe Vennéguès, Daniel Alquier, Jean-François Michaud. Direct Insight into Grains Formation in Si Layers Grown on 3C-SiC by Chemical Vapor Deposition. Acta Materialia, 2015, 98, pp.336-342. ⟨10.1016/j.actamat.2015.07.052⟩. ⟨hal-01784770⟩
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