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Article Dans Une Revue Applied Physics Letters Année : 2017

Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition

Etienne Puyoo
Rémi Rafael
Andreï Sabac
Martine Le Berre

Résumé

Platinum nanoparticle-based strain gauges are elaborated by means of atomic layer deposition on flexible polyimide substrates. Their electro-mechanical response is tested under mechanical bending in both buckling and conformational contact configurations. A maximum gauge factor of 70 is reached at a strain level of 0.5%. Although the exponential dependence of the gauge resistance on strain is attributed to the tunneling effect, it is shown that the majority of the junctions between adjacent Pt nanoparticles are in a short circuit state. Finally, we demonstrate the feasibility of an all-plastic pressure sensor integrating Pt nanoparticle-based strain gauges in a Wheatstone bridge configuration.
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Dates et versions

hal-01701521 , version 1 (05-06-2018)

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Etienne Puyoo, Christophe Malhaire, Daniel Thomas, Rémi Rafael, Mohamed R'Mili, et al.. Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition. Applied Physics Letters, 2017, 110, pp.123103. ⟨10.1063/1.4978778⟩. ⟨hal-01701521⟩
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