Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C) - Archive ouverte HAL
Communication Dans Un Congrès Année : 2002

Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C)

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Electronique
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Dates et versions

hal-01694309 , version 1 (27-01-2018)

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Olivier Robert, Gilles Amendola, Hua Chen, Olivier Gigan. Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C). SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, Dec 2002, Melbourne, Australia. ⟨10.1117/12.469399⟩. ⟨hal-01694309⟩
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