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Communication Dans Un Congrès Année : 2017

Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor

J. Streque
  • Fonction : Auteur
P. Pigeat
  • Fonction : Auteur
S. Hage-Ali
P. Boulet
H. M'Jahed
  • Fonction : Auteur
H M 'Jahed
  • Fonction : Auteur
O. Elmazria

Résumé

— Several SAW devices based on Sc 0.1 Al 0.9 N/Sapphire bilayer structures were fabricated using various wavelengths and film thicknesses. The acoustic velocity, electromechanical coupling coefficient and temperature coefficient of frequency (TCF) of each device was then measured and the results were compared with calculations using several sets of elastic, piezoelectric and dielectric constants available in the literature. We have shown that the accuracy of available constants is not enough to permit a reliable optimization and design of SAW devices for signal processing and sensors applications.
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Dates et versions

hal-01692287 , version 1 (24-01-2018)

Identifiants

Citer

F. Bartoli, Thierry Aubert, M. Moutaouekkil, J. Streque, P. Pigeat, et al.. Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor. 2017 IEEE SENSORS, Oct 2017, Glasgow, United Kingdom. ⟨10.1109/ICSENS.2017.8233938⟩. ⟨hal-01692287⟩
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