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Communication Dans Un Congrès Année : 2015

Combined Effects of Supersaturation and Stress for the Control of AlN Film Quality

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Matériaux
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Dates et versions

hal-01677366 , version 1 (08-01-2018)

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  • HAL Id : hal-01677366 , version 1

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Raphael Boichot, Danying Chen, Frederic Mercier, Mikhail Chubarov, Elisabeth Blanquet, et al.. Combined Effects of Supersaturation and Stress for the Control of AlN Film Quality. International Conference on Metallurgical Coatings and Thin Films (ICMCTF), " Hard Coatings and Vapor Deposition Technology, Apr 2017, San Diego, United States. ⟨hal-01677366⟩
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