Hydrogen Diffusion and Shallow Acceptor Passivation in p‐Type InP - Archive ouverte HAL
Communication Dans Un Congrès Année : 1989

Hydrogen Diffusion and Shallow Acceptor Passivation in p‐Type InP

A Jalil
  • Fonction : Auteur
Bertrand Theys
Jc Pesant
  • Fonction : Auteur
M Aucouturier
  • Fonction : Auteur
B Rose
  • Fonction : Auteur
A Mircea
  • Fonction : Auteur

Résumé

Undoped GaInAs/zinc-doped InP structures grown by metal-organic chemical vapour deposition have been exposed to a RF hydrogen or deuterium plasma. Secondary ion mass spectrometry experiments show deuterium diffusion in both materials and the existence of a hydrogen-acceptor pairing effect in the p-type InP layer. After hydrogenation, the InP layer becomes highly resistive as a result of a strong passivation of acceptors by hydrogen. Hall effect and conductivity measurements performed on a lightly thermally reactivated InP layer indicate that the hole mobility is significantly higher than in the non-hydrogenated InP layer. This increase is attributed to a decrease of the ionised acceptor concentration under hydrogenation and is consistent with the existence of a pairing between the proton and the ionised acceptor giving rise to neutral Zn-H complexes. The relative thermal stability of Zn-H complexes in InP:Zn if compared to GaAs:Zn can be interpreted with the help of the microscopic model of these complexes, hydrogen being more tightly bonded to a phosphorus than to an arsenic atom.
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hal-01670960 , version 1 (18-01-2022)

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Jérôme Chevalier, A Jalil, Bertrand Theys, Jc Pesant, M Aucouturier, et al.. Hydrogen Diffusion and Shallow Acceptor Passivation in p‐Type InP. Materials Science Forum, 1989, Unknown, Unknown Region. pp.991-996, ⟨10.1088/0268-1242/4/2/006⟩. ⟨hal-01670960⟩
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