Contactless device for the fast conductivity characterization of a large range semiconductors - Archive ouverte HAL
Communication Dans Un Congrès Année : 2016

Contactless device for the fast conductivity characterization of a large range semiconductors

Résumé

We report on the development and application of a brand-new contactless method based on eddy currents with a view to designing a generic apparatus for the characterization of some transport properties of a large range of semiconductors. The eddy current probe, constituted of a coil connected to a transmission line, interacts with the semiconductor wafer under inspection. The innovative approach of this work consists in measuring the impedance of the coil by reflectometry using a broadband multicarrier test signal, i.e. containing multiple frequencies. An electromagnetic model of the coil-wafer interaction is then used to estimate the conductivity of the wafer. This process results in a new contactless conductivity measurement system that exhibits a very wide conductivity measurement range and allows the characterization of a large variety of semiconductor materials. The device is also very fast potentially allowing the measurement of transport properties of semiconductors in fast transient conditions. As a practical example, the performance of our device is demonstrated by estimating the conductivity of a set of crystalline silicon wafers.
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Dates et versions

hal-01637727 , version 1 (17-11-2017)

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Florent Loëte, Yann Le Bihan, Denis Mencaraglia. Contactless device for the fast conductivity characterization of a large range semiconductors. International Symposium on Semiconductor Manufacturing (ISSM 2016), Dec 2016, Tokyo, Japan. 4p., ⟨10.1109/issm.2016.7934522⟩. ⟨hal-01637727⟩
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