Fabrication and characterization of gas detection microfluidic system

In this study a gas detection microfluidic system was realized. Firstly, microfluidic and thermal simulations were done to determine the microsystem dimensions. Heat distribution was then simulated. These results allowed us the best material choices suited for the application. The microsystem has been realized with conventional microelectronic processes and was characterized to evaluate the heater thermal stability and the temperature gradient inside the microsystem. Finally, the gas sensor is exposed to ammonia concentrations between 10 and 100 ppm at 473 K.

Mots clés

microsystem microfluidic gas detection thermal creep ammonia thin film metal oxide WO3

Domaines

Micro et nanotechnologies/Microélectronique

Fichier principal

2010_Martini_Fabrication-and-characterization-of-gas-detection-microfluidic-system.pdf (586.6 Ko)

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https://hal.science/hal-01635821

Soumis le : mercredi 15 novembre 2017-17:12:21

Dernière modification le : lundi 10 juin 2024-16:58:03

Archivage à long terme le : vendredi 16 février 2018-15:48:17

Dates et versions

hal-01635821 , version 1 (15-11-2017)

Identifiants

HAL Id : hal-01635821 , version 1
DOI : 10.1016/j.proeng.2010.09.324

Citer

V. Martini, Sandrine Bernardini, Marc Bendahan, Khalifa Aguir, P. Perrier, et al.. Fabrication and characterization of gas detection microfluidic system. Procedia Engineering, 2010, 5, pp.1188 - 1191. ⟨10.1016/j.proeng.2010.09.324⟩. ⟨hal-01635821⟩

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