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Article Dans Une Revue Procedia Engineering Année : 2010

Fabrication and characterization of gas detection microfluidic system

Résumé

In this study a gas detection microfluidic system was realized. Firstly, microfluidic and thermal simulations were done to determine the microsystem dimensions. Heat distribution was then simulated. These results allowed us the best material choices suited for the application. The microsystem has been realized with conventional microelectronic processes and was characterized to evaluate the heater thermal stability and the temperature gradient inside the microsystem. Finally, the gas sensor is exposed to ammonia concentrations between 10 and 100 ppm at 473 K.
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Dates et versions

hal-01635821 , version 1 (15-11-2017)

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V. Martini, Sandrine Bernardini, Marc Bendahan, Khalifa Aguir, P. Perrier, et al.. Fabrication and characterization of gas detection microfluidic system. Procedia Engineering, 2010, 5, pp.1188 - 1191. ⟨10.1016/j.proeng.2010.09.324⟩. ⟨hal-01635821⟩
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