Ozone Sensor on Flexible Substrate by ZnO nanoparticles
Résumé
In this work the ozone detection in flexible substrate has been investigated. The flexible test platform with an integrated heater was designed and then characterized by thermal simulations using finite elements and its electrical properties have been studied. ZnO nanoparticles were deposited by drop coating process on the flexible substrate with platinum interdigited electrodes for gas detection. The gas sensing properties were determined by ozone exposure at different concentrations and temperatures. The gas sensing measurements present good response at different gas concentrations, good repeatability and fast recovery.