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Communication Dans Un Congrès Année : 2017

Microwave Sensor within a Microfluidic Chip for Biological Applications

Résumé

A miniaturized sensor operating in Radio Frequency region (RF) is proposed to address the need in picoliter liquid characterization. The sensor is based on a coplanar waveguide (CPW) combined with a microfluidic channel dedicated to microliter liquid characterization with perspectives for biology and single cell characterization. Using microtechnology process, the sensor has been designed on a 0.5 mm thick quartz wafer with Cr/Au electrodes. A prototype of the sensor has been fabricated and evaluated with ethanol/water mixtures at different molar fractions of ethanol. A good agreement between theoretical and measured electrical response of the sensor is observed.
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Dates et versions

hal-01592115 , version 1 (31-08-2023)

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Abdelhatif El Fellahi, Thierry Bore, Lionel Rousseau, Bruno Le Pioufle, Olivier Français. Microwave Sensor within a Microfluidic Chip for Biological Applications. Eurosensors 2017, Sep 2017, Paris, France. pp.1-4, ⟨10.3390/proceedings1040523⟩. ⟨hal-01592115⟩
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