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Communication Dans Un Congrès Année : 2017

On nanopositioning control of a cantilever with electrostatic actuation and tunneling current sensing based on multi-mode modelling

Alina Voda
Lukasz Ryba
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Résumé

Considering a cantilever motion subject to electrostatic actuation and tunnelingcurrent sensing, a multi-mode model is first analyzed, with an emphasis on the effect ofactuator/sensor location. In particular, it is underlined how specific locations can result ina model of reduced order, making in turn a related control design more simple. This is thenillustrated by a robust control scheme aiming at positioning the cantilever. This control inparticular handles the effect of proximity forces, and the results are illustrated in simulation
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Dates et versions

hal-01579038 , version 1 (30-08-2017)

Identifiants

  • HAL Id : hal-01579038 , version 1

Citer

Alina Voda, Gildas Besancon, Lukasz Ryba. On nanopositioning control of a cantilever with electrostatic actuation and tunneling current sensing based on multi-mode modelling. IFAC WC 2017 - 20th IFAC World Congress, Jul 2017, Toulouse, France. ⟨hal-01579038⟩
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