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Communication Dans Un Congrès Année : 2016

Numerical and experimental investigation of cryogenic etching of silicon and porous low-dielectric

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hal-01561212 , version 1 (12-07-2017)

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Stefan Tinck, Thomas Tillocher, Remi Dussart, Erik Neyts, Annemie Bogaerts. Numerical and experimental investigation of cryogenic etching of silicon and porous low-dielectric. International Symposium on Dry Process 2016 (DPS2016), Nov 2016, Sapporo, Japan. ⟨hal-01561212⟩
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