Article Dans Une Revue Microelectronics Reliability Année : 2003

Application of picosecond ultrasonics to non-destructive analysis in VLSI circuits

Bertrand Audoin
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Résumé

Picosecond ultrasonics is an optical non-destructive technique based on ultrasound generation and detection by ultrashort laser pulses. We demonstrate the efficiency of this technique for material characterization in VLSI circuits, and show the influence of the laser pulse duration on acoustic generation and detection.

Dates et versions

hal-01550917 , version 1 (29-06-2017)

Identifiants

Citer

G. Andriamonje, V. Pouget, Y. Ousten, D. Lewis, Y. Danto, et al.. Application of picosecond ultrasonics to non-destructive analysis in VLSI circuits. Microelectronics Reliability, 2003, 43 (9-11), pp.1803-1807. ⟨10.1016/s0026-2714(03)00307-x⟩. ⟨hal-01550917⟩
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