Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges - Archive ouverte HAL
Article Dans Une Revue Applied Physics Letters Année : 2013

Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges

Résumé

Using experimental measurements complemented with particle-in-cell (PIC) simulations, we demonstrate a reduction in the electrical asymmetry effect in capacitively coupled discharges for low excitation frequencies (0.8 MHz < f<10 MHz). These results confirm PIC simulation predictions made by [I. Korolov, Z. Donkó, U. Czarnetzki, and J. Schulze, J. Phys. D: Appl. Phys. 45, 465205 (2012)], where this effect was investigated for dual-frequency discharges in which the driving frequencies are phase-shifted harmonics. Because the reduction in electrical asymmetry is a sensitive function of the secondary electron emission coefficient, we are able to non-invasively estimate this coefficient as 0.035 for argon ions incident on aluminium electrodes.
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Dates et versions

hal-01549406 , version 1 (28-06-2017)

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Jean-Paul Booth, Trevor Lafleur. Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges. Applied Physics Letters, 2013, 102, pp.154104. ⟨10.1063/1.4802241⟩. ⟨hal-01549406⟩
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