Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms - Archive ouverte HAL
Article Dans Une Revue Plasma Sources Science and Technology Année : 2014

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

Bastien Bruneau
  • Fonction : Auteur
T. Novikova
  • Fonction : Auteur
Jean-Paul Booth
E.V. Johnson

Résumé

Using particle-in-cell simulations, we predict that it is possible to obtain a significant difference between the ion flux to the powered electrode and that to the grounded electrode?with about 50% higher ion flux on one electrode?in a geometrically symmetric, radiofrequency capacitively-coupled plasma reactor by applying a non-sinusoidal, ?Tailored? voltage waveform. This sawtooth-like waveform presents different rising and falling slopes over one cycle. We show that this effect is due to differing plasma sheath motion in front of each electrode, which induces a higher ionization rate in front of the electrode which has the fastest positive rising voltage. Together with the higher ion flux comes a lower voltage drop across the sheath, and therefore a reduced maximum ion bombardment energy; a result in contrast to typical process control mechanisms.
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Dates et versions

hal-01549377 , version 1 (28-06-2017)

Identifiants

Citer

Bastien Bruneau, T. Novikova, Trevor Lafleur, Jean-Paul Booth, E.V. Johnson. Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms. Plasma Sources Science and Technology, 2014, 23 (6), pp.065010. ⟨10.1088/0963-0252/23/6/065010⟩. ⟨hal-01549377⟩
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