Electron density measurements in highly electronegative plasmas - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Plasma Sources Science and Technology Année : 2016

Electron density measurements in highly electronegative plasmas

Résumé

In this paper we present experimental measurements of the electron density in very electronegative ‘ion–ion’ Ar–SF 6 plasmas where previous investigations using Langmuir probes have observed electronegativities of up to 5000. The electron density is measured using a short matched dipole probe technique that provides a tolerance better than  ±2 · 10 13 m −3 . The results demonstrate that the electron density in the low pressure plasma source (which contains a magnetic filter) can be reduced to around 2.7 · 10 13 m −3 with a corresponding plasma electronegativity of about 4000; close to that from fluid simulation predictions. The highest electronegativity, and lowest electron density, is achieved with a pure SF 6 plasma, while adding only 6% SF 6 to Ar allows the electronegativity to be increased from 0 to a few hundred with a corresponding decrease in the electron density by more than a thousand. The impedance probe based on a short matched dipole appears to be a practical diagnostic that can be used for independent measurements of the electron density in very electronegative plasmas, and opens up the possibility to further investigate and optimize electronegative plasma sources.
Fichier non déposé

Dates et versions

hal-01549346 , version 1 (28-06-2017)

Identifiants

Citer

D.V. Rafalskyi, Trevor Lafleur, Ane Aanesland. Electron density measurements in highly electronegative plasmas. Plasma Sources Science and Technology, 2016, 25 (4), pp.047001. ⟨10.1088/0963-0252/25/4/047001⟩. ⟨hal-01549346⟩
195 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More