A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma - Archive ouverte HAL
Article Dans Une Revue Plasma Sources Science and Technology Année : 2016

A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma

Efe Kemaneci
  • Fonction : Auteur
Jean-Paul Booth
Pascal Chabert
Jan van Dijk
  • Fonction : Auteur
Thomas Mussenbrock
  • Fonction : Auteur
Ralf Peter Brinkmann
  • Fonction : Auteur

Résumé

Vibrational levels of molecular oxygen, O 2 ( v   <  42), are investigated in continuous and pulse-modulated low-pressure radio-frequency oxygen plasma with a global modelling approach. The model is benchmarked against a variety of pressure-, power- and time-resolved measurements of several inductive and asymmetric capacitive discharges available in the literature, and a good agreement is obtained. The sensitivity of the model with respect to the vibrational kinetics, the wall reactions and the spatial inhomogeneity of the charged particles are presented. The simulations without the vibrational levels are also shown for the sake of comparison.
Fichier non déposé

Dates et versions

hal-01549335 , version 1 (28-06-2017)

Identifiants

Citer

Efe Kemaneci, Jean-Paul Booth, Pascal Chabert, Jan van Dijk, Thomas Mussenbrock, et al.. A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma. Plasma Sources Science and Technology, 2016, 25 (2), pp.025025. ⟨10.1088/0963-0252/25/2/025025⟩. ⟨hal-01549335⟩
157 Consultations
0 Téléchargements

Altmetric

Partager

More