Silicon Micromachined Sensors for Gas Detection - Archive ouverte HAL
Chapitre D'ouvrage Année : 2004

Silicon Micromachined Sensors for Gas Detection

Carmen Moldovan
  • Fonction : Auteur
Gabriel Vasile

Résumé

The paper presents the main principles of detection for the gas sensors silicon based. The silicon sensors present the advantages of miniaturization, integration of the processing signal circuits on the same chip with the sensor, reproducibility, low power consumption and high sensitivity. The realisation of gas microsensors on silicon using the micromachining techniques will be presented. The usual gas sensors silicon based can be divided in: Chemoresistive, Field effect transistor and resonant sensors. The layout and the micromachining technological steps for an interdigitated integrated capacitor used for gases detection, covered with phthalocyanine (Pc) as sensitive layer, the resonant gas sensors realized by silicon micromachining (design, simulation, technology, experiments) and the CHEMFET sensors will be shortly presented.

Dates et versions

hal-01486551 , version 1 (10-03-2017)

Identifiants

Citer

Carmen Moldovan, Gabriel Vasile, Mircea Modreanu. Silicon Micromachined Sensors for Gas Detection. Buzaneva E., Scharff P. Frontiers of Multifunctional Integrated Nanosystems. NATO Science Series II: Mathematics, Physics and Chemistry, 152, Springer, 2004, ⟨10.1007/1-4020-2173-9_34⟩. ⟨hal-01486551⟩
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